Special Gas System
SiH4, NF3, Cl2 are flammable and explosive gases, toxic gases, corrosive gases, and highly hazardous gases with purity exceeding 99.999% that require safety in the storage, transportation, and distribution processes of special gases. Special gas system engineering is an engineering project used to ensure the safe use of special gas systems. Gesparker provides comprehensive solutions including design, selection, manufacturing, installation, testing, debugging, and system hosting services